Extreme ultraviolet free-standing transmittance filters for high brilliance sources, based on Nb/Zr and Zr/Nb thin films on Si3N4 membranes: Design, fabrication, optical and structural characterization

K. Jimenez, P. Nicolosi, L. Juschkin, Nadeem Ahmed, A.E.H. Gaballah, E. Cattaruzza, M.G. Sertsu, A. Gerardino, A. Giglia, G. Mussler, P. Zuppella

Thin Solid Films • Vol. 695 • pp. 137739 • Elsevier BV